View the JEOL JIB-PS500i in action
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The JEOL JIB-PS500i is an advanced focused ion beam-scanning electron microscope (FIB-SEM) designed for precision nanomachining, imaging, and analytical workflows.
Ion source
Ga+ FIB
SEM Resolution
0.7 nm @ 15 kV
FIB Resolution
~3 nm @ 30 kV
Electron source
In-lens Schottky FEG
Stage range
X/Y 130 mm, Z 40 mm, tilt ±90°
Detectors
SE, BSE, Ultra Fast HR Synergie 3 EBSD detector from Oxford including online pattern matching procedure.
More on synergie 3 EBSD detectorMore on Pattern Matching