⚙️Technical Specifications
The FEI Quanta 3D FEG combines a field emission SEM and focused ion beam (FIB) column for high-resolution imaging, milling, and sample preparation.
Electron column
FEG SEM
Ion column
Ga+ FIB
SEM Resolution
0.8 nm @ 30 kV
FIB Resolution
~7 nm @ 30 kV
Detectors
SE, BSE, EDS, EBSD
Dual beam mode
Yes (simultaneous milling + imaging)